E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility Revision:SEMI E129-0709 - Superseded SEMI MF1048-1105 (technical revision)

SEMI MF1048-1105 (technical revision)

Background and description of an approach to understanding data quality and associated terminology

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SEMI E35-0307 (technical revision)

4 This Standard defines preparation and pretreatment procedures used for the evaluation of liquid chemical distribution system materials in a test fluid

E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility Revision:SEMI E129-0709 - Superseded SEMI MF1048-1105 (technical revision)The purpose of this Guide is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing environments. It is a guide for establishing electrostatic compatibility in facilities used for semiconductor manufacturing. Electrostatic compatibility of production equipment is addressed in SEMI E78. Electrostatic surface charge causes a number of undesirable effects in semiconductor manufacturing