E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) StdPbc-1017 SEMI MF1152-0316 (technical revision)

SEMI MF1152-0316 (technical revision)

orgで入手可能となる。初版は1997年発行。前版は2006年9月発行。

This Document describes the conditions and procedures for testing the accuracy

Thermal decomposition in muffle furnace or microwave muffle furnace may also be used

This Standard specifies the testing procedures and test equipment required for determining the load impedance and power efficiency of a matching network based on the positions of the tuning elements in the matching network

E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) StdPbc-1017 SEMI MF1152-0316 (technical revision)This Standard establishes a Specific Equipment Model (SEM) for AMHS storage equipment (Stocker SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of Stocker SEM equipment into an automated (e. g., semiconductor fabrication and flat panel display) factory.