P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System StdPbc-0812 which creates issues such as

which creates issues such as increase in cost

semiconductor manufacturers

and the existing standards for performing these tests are referenced

This leads to high efforts to specify the communication structures between FPU and the FMCS

and density

P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System StdPbc-0812 which creates issues such asThis specification was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www. semi. org February 2004; to be published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not