P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools SEMI E148 — Specification for

SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object

SEMI S14-0521 (technical revision)

but controlled

SEMI MF1152-0316 (technical revision)

In the months leading up to the formation of the SEMI Data Path Task Force

P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools SEMI E148 — Specification forThis standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www. semi. org in June 2007. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available