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P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdTpc-Stainless Steel Components SEMI E82-0705 (technical revision)
P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdTpc-Stainless Steel Components SEMI E82-0705 (technical revision)
$193.00
Description
SEMI E82-0705 (technical revision)
which control flow of ≤50 slm nitrogen equivalent at 308 kPa (44
It describes the concept of exception management
SEMI MF950-1107 (Reapproved 0718)
008 Ωcm and 0
P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdTpc-Stainless Steel Components SEMI E82-0705 (technical revision)This Standard specifies key requirements of fiducial marks that can be used as a coordinate system for referencing defect locations on extreme ultraviolet (EUV) blanks. This Standard is intended to set an appropriate level of technical specifications of mask fiducial marks, such as their locations, shapes, sizes, line dimensions, and limits of variation. The marks must be readable by mask metrology and pattern write tools. This Standard is not
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