E12200 - SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM) Revision:SEMI E122-0217 - Superseded SEMI E111-0117 (technical revision)

SEMI E111-0117 (technical revision)

orgで，そして2008年7月にCD-ROMで入手可能となる。

and automated test equipment

• CarrierID verification and Carrier slot map verification

or in an ad hoc request from the EDA Application

E12200 - SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM) Revision:SEMI E122-0217 - Superseded SEMI E111-0117 (technical revision)This Standard establishes a Specific Equipment Model for testing equipment (TSEM). The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment. These characteristics and behaviors are required to be implemented. The intent of this Standard is to facilitate the integration of testing equipment into an automated semiconductor factory. This Standard accomplishes this by defining an operational model for testing