F02600 - SEMI F26 - グレード10/0.2　有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded

F02600 - SEMI F26 - グレード10/0.2　有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Supersededglobal Gases Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org1997620033 10 0. 2 8 105 Pa 88 105 Pa 8 NH3 AsH3 PH3 Referenced SEMI Standards None.

SEMI S2-0712 (technical revision)

26-94 (technical revision)

it is necessary to standardize the classification of Mura for LCD

Standardizing INAA for application to silicon will remove differences in the analytical approach and will establish a common reference for the analyses

This symbol is included to provide for a smooth transition from existing traceability and labeling procedures to the comprehensive

SEMI M1-92 (technical revision)

or any other interested party

PCS適用範囲内での主要な機能化グループの特定，

The factory level controller (i

Wafers meeting the basic specification requirements herein are suitable for use as ‘mechanical handling’ wafers for equipment set-up and robotic handling applications

The method is sensitive to Na+

no materials requirements or micro-contamination limits are given in this Specification