D06600 - SEMI D66 - Terminology for Plastic Substrates of Flexible Display StdTpc-Documentation/Training · Metrology equipment

·    Metrology equipment

Details include:

The parallel input/output (PI/O) control signals between the production equipment and the AMHS must be better defined for more reliable and efficient carrier handoffs (load/unload) at production equipment load ports

SEMI E99-1104 (designation update)

8-0298 (technical revision)

D06600 - SEMI D66 - Terminology for Plastic Substrates of Flexible Display StdTpc-Documentation/Training · Metrology equipment1 Purpose 1. 1 In this Standard, definition and interpretation of each term provides characteristics of materials used for flexible display manufacturing. This Standard benefits unification of terminology generally used for plastic substrates of flexible display manufacturing. 2 Scope 2. 1 This Standard is applicable for plastic substrates of flexible display manufacturing. It covers terminology related to plastic substrates of flexible display, used