TEL Tokyo Electron 5087-404285-11 ARM-L SCAN (Z) Assembly EBR Lithius Working img{max-width:100%} Varian Semiconductor D116058002 Microprocessor

img{max-width:100%} Varian Semiconductor D116058002 Microprocessor PCB Card D116058100 350D Spare

721-27-746

Part No: 1018-538-01

img{max-width:100%} KLA-Tencor 11 301 404 123 000 WBI Controller Sensors Actuators CSA Unit Used

Part No: 815200000

TEL Tokyo Electron 5087-404285-11 ARM-L SCAN (Z) Assembly EBR Lithius Working img{max-width:100%} Varian Semiconductor D116058002 MicroprocessorTEL Tokyo Electron 5087 404285 11 ARM L SCAN (Z) Assembly EBR Lithius Working Part No: 5087 404285 11 Model No: SCAN (Z) ASSY,EBR ARM L Removed from a TEL Tokyo Electron Clean Track Lithius System Parts List (approximation, some parts may vary) Assembly Part No: 5087 404285 11 SCAN (Z) ASSY,EBR 5010 401944 12 BASE 1 5010 305119 11 PLATE,UNDER 1 5010 303327 11 PLATE,UPPER 1 5018 000024 11 #FLANGE,KR15 1 5010 310138 11 ARM(30),EBR 1 5010 407877 11