F04700 - SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity StdTpc-Flat Panel Display 1 The purpose of this

1  The purpose of this Standard is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards

Specification of data variables required to communicate basic equipment performance data to the host computer

Figures 1 and 2 show examples of types of AMHS equipment

エッジ近傍の幾何学的特性情報は製造者や消費者がウェーハの寸法特性が与えられた幾何学的要求を満たしているかどうか決定することを手助けできる。

1 mm厚のガラス基板の水平搬送や保管に使用するカセットについて規定する。

F04700 - SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity StdTpc-Flat Panel Display 1 The purpose of thisSemiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls. Semiconductor processing equipment is especially vulnerable to voltage sags. This Specification defines the voltage sag immunity required for semiconductor processing, metrology, and automated test equipment. This Specification strikes a balance between voltage sag immunity and increased equipment cost. This Specification sets minimum