E03900 - SEMI E39 - 객체 서비스 표준: 컨셉트, 동작, 서비스 Revision:SEMI E39-0703 (Reapproved 1109) - Superseded 3DS-IC Global Technical Committeeで技術的に承認されている。現版は2012年8月30日，global Audits

3DS-IC Global Technical Committeeで技術的に承認されている。現版は2012年8月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年9月にwww

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Track basic equipment states in a modular manner

which is determined by the amount of moisture taken up by the system and subsequently released in any exposure after receipt

The purpose of this Standard is to define a test method for the determination of the outgassing organic contamination from minienvironments used for storage and transport of wafers using gas chromatography/mass spectroscopy (GC/MS)

E03900 - SEMI E39 - 객체 서비스 표준: 컨셉트, 동작, 서비스 Revision:SEMI E39-0703 (Reapproved 1109) - Superseded 3DS-IC Global Technical Committeeで技術的に承認されている。現版は2012年8月30日，global AuditsGlobal Information & Control Committee , 2009 9 4 Global Audits and Reviews Subcommittee . 1995 , 2003 7 . www. semi. org . (Object Services Standard (OSS)) , . . (Standard) . (Standard) public , . (Standards) , (Object Services) . . (Standards) , (Standards) . Subordinate Document: SEMI E39. 1 0703 (Reapproved 1109) SECS II Protocol for Object Services Standard (OSS) Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message