E05418 - SEMI E54.18 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device Revision:SEMI E54.18-0914 - Superseded and/or mechanical process

and/or mechanical process

SEMI F39-1223 (complete rewrite)

SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)

excluding power and communications)

org in May 2017

E05418 - SEMI E54.18 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device Revision:SEMI E54.18-0914 - Superseded and/or mechanical processNOTICE: This Standard is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. 1 Purpose 1. 1 This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects which are common to all vacuum pump devices (VPD) on a