F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Revision:SEMI F52-0600 - Superseded and substrate ID

and substrate ID

semiconductor manufacturers

SEMI F15-93 (Reapproved 1104)

This Guide is provided as a reference for diffusion furnace equipment manufacturers and customers

SEMI C58 — Specification for Hydrogen

F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Revision:SEMI F52-0600 - Superseded and substrate IDThis specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on June 19, 2001. Initially available on www. semi. org August 2001; to be published November 2001. Originally published June 2000. NOTICE: This Standard or Safety Guideline has an