F04600 - SEMI F46 - Revision:Default Title 해당 버전의 출판은 2011년 12월

해당 버전의 출판은 2011년 12월 24일 Global Audits and Reviews Subcommittee에 의해 승인되었다

NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline

3の改訂を反映して，0211の出版サイクルにて，SEMI E142の出版年月が改訂された。

The symbols written by capital or small letters must be strictly used with distinction for the correct expression of a crystal plane

including GaAs

F04600 - SEMI F46 - Revision:Default Title 해당 버전의 출판은 2011년 12월This guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been