E04000 - SEMI E40 - Specification for Processing Management Revision:SEMI E40-96 - Superseded such as caustics and oxidizers

such as caustics and oxidizers

自動搬送用は，ウェーハキャリアと自動ウェーハプロセス装置のインタフェースの使用上の要求事項を満たすものである。自動搬送用は125 mmウェーハサイズを対象としている。

6-95 (first published)

SEMI G71-0996 (Reapproved 0823)

SEMI M38-0306 (technical revision)

E04000 - SEMI E40 - Specification for Processing Management Revision:SEMI E40-96 - Superseded such as caustics and oxidizers* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1