M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors Revision:SEMI M87-0422 - Current electrical measurement

electrical measurement

SEMI MF84 — Test Method for Measuring Resistivity of Silicon Slices with a Collinear Four-Probe Array

surface metals such as iron

Provide guidelines of applying appropriate security measures for equipment to optimize cost

SEMI MF1529-02 (first SEMI publication)

M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors Revision:SEMI M87-0422 - Current electrical measurementThe purpose of this Test Method is to specify methods for the contactless measurement of the resistivity of semi insulating samples and wafers. This Test Method covers the determination of the electrical resistivity of semi insulating semiconductors, including GaAs, InP, CdTe, Cd(Zn)Te, SiC, GaN, and AlN, within the resistivity range 1E5 to 1E12 cm. It may also be used to characterize other materials exhibiting resistivity in this range, including in