F04800 - SEMI F48 - Test Method for Determining Trace Metals in Polymer Materials StdTpc-Gases - Specialty acetal resin

acetal resin

SEMI E82-1102 (technical revision)

34-92 (technical revision)

2-0306 (first published)

form a complete Interoperability Specification for the ISPM

F04800 - SEMI F48 - Test Method for Determining Trace Metals in Polymer Materials StdTpc-Gases - Specialty acetal resinNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Test Method provides a procedure for determining the nonvolatile trace inorganic impurities in bulk polymeric materials. 2 Scope 2. 1 Following digestion by dry ashing (DDA) or digestion in closed vessel