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C00339 - SEMI C3.39 - 三フッ化窒素（NF3）99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded SEMI M16-1296 (technical revision)
C00339 - SEMI C3.39 - 三フッ化窒素（NF3）99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded SEMI M16-1296 (technical revision)
$115.50
Description
SEMI M16-1296 (technical revision)
smart phones
add the measurement conditions and several chip sizes for test vehicle
SEMI MF847-02 (first SEMI publication)
この文書では，液中パーティクルカウンタの計数効率試験の条件を定義する。
C00339 - SEMI C3.39 - 三フッ化窒素（NF3）99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded SEMI M16-1296 (technical revision)global Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org198920043 (NF3) Referenced SEMI Standards None.
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