E11200 - SEMI E112 - Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles Revision:SEMI E112-1106 - Superseded You may choose to stay

You may choose to stay within one product type or choose a combination of product types

The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model

Background and description of an approach to understanding data quality and associated terminology

7の表1に示す帯電の最大推奨レベルを決定する方法について説明する。SEMI E129にある独自の方法，およびこのガイドとSEMI E78の推奨を整合させる更新情報の両方を含んでいる。

1-0303 (first published)

E11200 - SEMI E112 - Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles Revision:SEMI E112-1106 - Superseded You may choose to stayNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given