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SEMI ソフトウエアスタンダードSECS/GEMセミナー StdTpc-Package Test Methods SEMI PV76-0622 (technical revision)

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SEMI PV76-0622 (technical revision)

CarrierID 검증과 캐리어(Carrier) 슬롯 맵 검증

The surface characterization tests to be performed are specified herein

such as nano indentation or nano-dynamic mechanical analysis (DMA)

12 125mm鏡面研磨単結晶シリコンウェーハ(オリフラあり,セカンダリフラットなし)

SEMI ソフトウエアスタンダードSECS/GEMセミナー StdTpc-Package Test Methods SEMI PV76-0622 (technical revision)2411450 68741112 3545469 616379359

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