F00100 - SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様 StdTpc-Flat Panel Display The SECS-I Standard defines a

The SECS-I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host

collection events

参考のために，一般にメトリックと呼ばれるSI (System International）単位を使われなければならない。

and end-users

to be published July 2003

F00100 - SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様 StdTpc-Flat Panel Display The SECS-I Standard defines aNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Referenced SEMI Standards (purchase separately) SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Revision History SEMI F1 0812 (technical revision) SEMI F1 96 (technical revision) SEMI F1