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E13400 - SEMI E134 - Specification for Data Collection Management Revision:SEMI E134-1225 - Current SEMI E84-0701 (technical revision)
E13400 - SEMI E134 - Specification for Data Collection Management Revision:SEMI E134-1225 - Current SEMI E84-0701 (technical revision)
$118.00
Description
SEMI E84-0701 (technical revision)
originally published in 1983
1-1017 (technical revision)
It does not include information on the structure of the message
or their carriers
E13400 - SEMI E134 - Specification for Data Collection Management Revision:SEMI E134-1225 - Current SEMI E84-0701 (technical revision)* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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