T01000 - SEMI T10 - 二次元データマトリクス直接マーク品質を評価する試験方法 Revision:SEMI T10-0701 (Reapproved 0912) - Superseded Two representative two-wafer stacks are

Two representative two-wafer stacks are depicted in Figure 1 and Figure 2

ULSI and other devices have been increasingly miniaturized and integrated

after they have been subjected to an elevated ambient temperature and cooled to room temperature (hereafter referred to as a "Heat Cycle")

Equipment (through reference to SEMI E78)

This specification defines the materials and acceptance criteria for high-temperature

T01000 - SEMI T10 - 二次元データマトリクス直接マーク品質を評価する試験方法 Revision:SEMI T10-0701 (Reapproved 0912) - Superseded Two representative two-wafer stacks areglobal Traceability Technical Committee2012830global Audits and Reviews Subcommittee20129www. semiviews. org www. semi. org2001720073 , Referenced SEMI Standards None.