E09400 - SEMI E94 - 컨트롤 잡 관리 사양 StdTpc-FPD Masks o substrates in one or

o substrates in one or more process modules where the recipe execution begins and ends simultaneously for all substrates in the process module

3  This Guide is complementary to existing SEMI Test Methods for measuring these parameters on single wafers

SEMI E115-0302E (Reapproved 0816)

and wafer to wafer stacking

the required attributes

E09400 - SEMI E94 - 컨트롤 잡 관리 사양 StdTpc-FPD Masks o substrates in one orThis Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in March 2014; originally published February 2000; previously published July 2013. This Specification describes equipment provided services to the factory that supports a high level of factory