M04100 - SEMI M41 - 電源デバイス／IC用シリコン・オン・インシュレーター（SOI）の仕様 StdPbc-1016 The dynamic test method evaluates

The dynamic test method evaluates performance during component operation and provides an indication of the steady state particle contribution due to dynamic operating conditions

The information from this test will be of value in rating flash performance of any given compound to that in production use

Equipment (through reference to SEMI E78)

SEMI E126-0708 (Reapproved 0823)

NOTICE: This Document was balloted and approved for withdrawal in 2008

M04100 - SEMI M41 - 電源デバイス／IC用シリコン・オン・インシュレーター（SOI）の仕様 StdPbc-1016 The dynamic test method evaluatesglobal Silicon Wafer Committee2007425global Audits and Reviews Subcommittee20076www. semi. org20077CD ROM20006200111 ICSOI Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M34 Guide for Specifying SIMOX Wafers SEMI M53 Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Polystyrene Latex Spheres on Unpatterned