E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded single-in-line

single-in-line

SEMI E134 — Specification for Data Collection Management

This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12

The purpose of this document is to provide a standard

PBET helps to increase productivity and reduce costs based on the metrics defined in SEMI E79 and SEMI E35

E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded single-in-lineThis Standard describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor actuator communication network. This Standard is applicable to sensors which are regarded as data producers only.