E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard StdPbc-0321 SEMI E116-0623 (technical revision)

SEMI E116-0623 (technical revision)

This Document defines various aspects of the edges of a flat panel display substrate and describes their relationships

SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

3  This process data reporting capability provides a factory’s applications the means of linking sampled time series data (Traces) and summary process data to related context data

SECS-II) are added as adjunct standards

E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard StdPbc-0321 SEMI E116-0623 (technical revision)The purpose of this Standard is to ensure minimum necessary level of physical connectivity between the transport module and process modules comprising the cluster tool for 450 mm. It is expected that a process module can be connected to the transport module of any cluster tool with least design change provided that both modules meet the requirement of this Standard. Process modules accept wafers at locations that may vary substantially from one module