E11300 - SEMI E113 - 半導体処理装置の高周波（RF）電力供給システム用仕様 StdTpc-Tubing Fittings & Valves This Standard stipulates transport related

This Standard stipulates transport related materials and systems to minimize the total cost relating to transport of 300 mm wafers from the wafer supplier to the customer

This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool

SEMI E1 — Specification for 3

SEMI E68-0997 (Reapproved 1103)

Generic Services

E11300 - SEMI E113 - 半導体処理装置の高周波（RF）電力供給システム用仕様 StdTpc-Tubing Fittings & Valves This Standard stipulates transport relatedNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Metrics Global Technical Committee20111224global Audits and Reviews Subcommittee20125www. semiviews. org www. semi. org20011120063 : (RF) RFRFRF RFRF RFRF RF (CVDPVD) RF Referenced SEMI Standards SEMI E10 Specification for Definition