E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded The purpose of this Specification

The purpose of this Specification is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards

1 The scope of the GEM Standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link

This Standard applies to all documentation provided by the equipment supplier to the equipment purchaser for new semiconductor

100%サンプリングの要求条件は，サンプリング目的で使用される各シリンダ中のガスの総量を制限する。この制限は，低濃度レベルにおけるパーティクルサンプリングに対する統計的要求を緩和する。

SEMI E140-1022 (technical revision)

E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded The purpose of this SpecificationThe purpose of this Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader Writer to an upstream controller. A standard interface will increase interchangeability of Carrier ID Reader Writers so that users and equipment suppliers have a wider range of choices. This Standard addresses the functional requirements for a generic Carrier ID Reader Writer