E11600 - SEMI E116 - 装置性能トラッキング（EPT）のための仕様 Revision:SEMI E116-0707E - Superseded SEMI D57 — Definition of

SEMI D57 — Definition of Measurement Index (VCT) for Mura in FPD Image Quality Inspection

1が新たに作成されたことを反映して，0307の出版サイクルで更新された。

그 내용이 가지는 의미와 장비에서 지원하는 데이터가 어떤 인터페이스로 관리되는지를 정의한다

Tube fittings defined in this method are made of fluorocarbon materials for all parts in contact with the internal fluid

and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing EquipmentSEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company QualificationsSEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing EquipmentSEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation ProcessSEMI S12 — Environmental

E11600 - SEMI E116 - 装置性能トラッキング（EPT）のための仕様 Revision:SEMI E116-0707E - Superseded SEMI D57 — Definition ofNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI E 20079R1 13 300 mmEPT EPTEPTEPTEPTMES: Manufacturing Execution SystemSEMI E10SEMI E79EPT (EPT: Equipment Performance Tracking) EPT SEMI E10SEMI E58 SEMI E58SEMI E58SEMI E10 SEMI E10SEMI E79SEMI E10SEMI E79EPTSEMI E10SEMI E79EPTSEMI