P03000 - SEMI P30 - 寸法測定用走査型電子顕微鏡（CD-SEM）の目録発行の実施要領 StdPbc-0118 This document describes the format

This document describes the format and methods in which strip map information shall be formatted and used to transfer information about a strip to and from equipment using the SECS/GEM interface standard (see SEMI E5)

SEMI E70-0298 (first published)

This Test Method covers four procedures that are widely used for making routine measurements

SEMI E125-0704 (technical revision)

this Standard provides equipment suppliers with definitions and limitations on the footprint occupied by production equipment during operation

P03000 - SEMI P30 - 寸法測定用走査型電子顕微鏡（CD-SEM）の目録発行の実施要領 StdPbc-0118 This document describes the formatNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2004723Japanese Regional Standards Committee20049www. semi. org2004111997 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to