F04000 - SEMI F40 - 化学試験のための薬液分配部品の準備についての作業方法 StdPbc-1019 SEMI D62-0611 (first published)
$115.50
Description
SEMI D62-0611 (first published)
This test method may provide guidelines for the application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time
この仕様は，電力がプラズマを作り，維持するために直接使われる半導体処理装置のRF（高周波）電力供給システムに適用される。
本スタンダードでは半自動（PGVなど）や自動搬送（AGVやOHTなど）により450TFCをロード，アンロードすることを想定している。
provide a common understanding of functions of EFEM and associated interfaces between functional elements (components with particular function roles)
F04000 - SEMI F40 - 化学試験のための薬液分配部品の準備についての作業方法 StdPbc-1019 SEMI D62-0611 (first published)Global Facilities CommitteeNorth American Facilities Committee19981218North American Regional Standards Committee19992SEMI On Line19996 2005510. 21 O 3 49HF30H2O229NH4OHIPA Referenced SEMI Standards None.
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