D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0623 - Current worldwide means to describe pressure

worldwide means to describe pressure parameters as they relate to mass flow controllers (MFC)

the following merits can be expected: Both panel and equipment manufacturers

SEMI E54 — Sensor/Actuator Network Standard

This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27

SEMI E82-0304 (technical revision)

D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0623 - Current worldwide means to describe pressureThis Specification defines the standard for substrates used to fabricate flat panel display masks. This Specification applies to photomasks that are principally used in fabricating flat panel displays. The edge lengths specified range from 202. 8 mm 202. 8 mm to 1620 mm 1780 mm. Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1). Referenced SEMI Standards (purchase separately) SEMI P1