HB01200 - SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS) Revision:SEMI HB12-1219 - Current This guideline defines the content

This guideline defines the content and methods for use of test masks used in the evaluation of mask defect inspection systems

orgで入手可能となる。初版は2006年3月発行。

·        プロセスカセットまたはクォーツボートとプロセスチェンバーの底面との間

Following the guidelines outlined in this test method

SEMI E47-95 (first published)

HB01200 - SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS) Revision:SEMI HB12-1219 - Current This guideline defines the contentAs the high brightness light emitting diode (HB LED) and patterned sapphire substrate (PSS) industry is under rapid development, it is very necessary to establish the standard for PSS products, which can provide a clear and common basis to meet the demands of research and development, production and sale for light emitting diode (LED) industry. Because the PSS industry belongs to the upstream in the whole LED industry, a sound standard and