E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011 customers of such substrates will

customers of such substrates will find that these specifications are useful guides in defining their requirements

Both user and supplier of the minienvironment shall agree upon all important parameters defined in this Test Method

• fundamental GEM requirements and

such as gold (Au) films

1-0702 (technical revision)

E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011 customers of such substrates willglobal Physical Interfaces and Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org200211200411 RSP Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19. 3 Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E72 Specification and Guide for 300 mm Equipment