ADTEC AXR-2000III Plasma Generator Novellus 27-360919-00 No Key Tested Working This Aera FC-D981SBC is used

This Aera FC-D981SBC is used working surplus

Part No: 02-161290-00

Model No: MOTHER-404

Inventory # A-16319

Part No: STG-STC-33/5V1-X8

ADTEC AXR-2000III Plasma Generator Novellus 27-360919-00 No Key Tested Working This Aera FC-D981SBC is usedADTEC AXR 2000III Plasma Generator Novellus 27 360919 00 No Key Tested Working Part No: AXR 2000III Novellus Part No: 27 360919 00 Supplier Part No: 10222301 Input: 3, 200 220VAC, 50 60Hz, 4. 1kVA Output: 2000W @ 13. 56MHz CE Marked Made in Japan This item was tested in our facility and is fully functional. The unit requires a remote interlock to function (not included). The unit can be pinned out with pinouts at 3 10 to activate the interlock bypass.