M06100 - SEMI M61 - 埋め込み層付きシリコンエピタキシャルウェーハの仕様 Revision:SEMI M61-0307 - Superseded Only the mechanical interfaces for

Only the mechanical interfaces for the tape frame cassette are specified

but to align with and cite the usage of existing standards

a specification of content shall be expressed as a numerical limit in units of mole per mole (mole/mole)

RF devices

SEMI G15-93 (technical revision)

M06100 - SEMI M61 - 埋め込み層付きシリコンエピタキシャルウェーハの仕様 Revision:SEMI M61-0307 - Superseded Only the mechanical interfaces forglobal Silicon Wafer Technical Committee2012221global Audits and Reviews Subcommittee20126www. semiviews. org www. semi. org20057 SEMI M1SEMI M2 Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M2 Specifications for Silicon Epitaxial Wafers for Discrete Device Applications SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology for Silicon Technology SEMI MF26 Test Methods for