HB01300 - SEMI HB13 - Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface StdPbc-712 SEMI D31-0213 (technical revision)
$193.00
Description
SEMI D31-0213 (technical revision)
Joint report from SEMI and TechSearch International examining the global semiconductor packaging materials market size and 5-year forecast to 2024
SEMI MF1630 –– Test Method for Low Temperature FTIR Analysis of Single Crystal Silicon for III-V Impurities
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HB01300 - SEMI HB13 - Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface StdPbc-712 SEMI D31-0213 (technical revision)The purpose of this Standard is to provide a supplement for the equipment automation interface for communication and control of process, automation and metrology equipment used in HB LED manufacturing. It intends to define the data collection for tracking wafer activity when using a susceptor or a wafer carrier. This Standard serves as a reference for both HB LED manufacturers and equipment suppliers. The document details properties and functions of
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