G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer Revision:SEMI G94-0113 (Reapproved 1123) - Current SEMI G63-95 (Reapproved 0302)

SEMI G63-95 (Reapproved 0302)

SEMI HB10-1018 (first published)

orgで，そして2006年3月にCD-ROMで入手可能となる。初版は2005年1月発行，前版は2005年3月に発行された。

This mandates test methods of organic compounds on wafer surfaces

SEMI M73-0309 (technical revision)

G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer Revision:SEMI G94-0113 (Reapproved 1123) - Current SEMI G63-95 (Reapproved 0302)This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection. This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container. The