E00600 - SEMI E6 - 半導体製造装置の設置に関する文書のガイド StdTpc-XML Changes were made to Section

Changes were made to Section 4

• Carrier transfer between automated material handling system (AMHS) vehicles and production equipment load ports

org in February 2009

SEMI G71-0996 (Reapproved 0811)

Detailed information on the method is found in ASTM G150

E00600 - SEMI E6 - 半導体製造装置の設置に関する文書のガイド StdTpc-XML Changes were made to SectionGlobal Facilities CommitteeNorth American Facilities Committee20021122North American Regional Standards Committee20031www. semi. org200331982199612 : 2002SEMI E6 Referenced SEMI Standards SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E52 Practice for Referencing Gases Used in Digital Mass Flow Controllers SEMI E63 Mechanical Specification for 300 mm Box Opener Loader to Tool Standard (BOLT)