Semiconductor devices. Micro-electromechanical devices - Environmental and dielectric withstand test methods for MEMS piezoelectric thin films Ingestion-build-63436 trigger events for planned maintenance

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Semiconductor devices. Micro-electromechanical devices - Environmental and dielectric withstand test methods for MEMS piezoelectric thin films Ingestion-build-63436 trigger events for planned maintenanceWhat is this standard about? This part of IEC 62047 specifies test methods for evaluating the durability of MEMS piezoelectric thin film materials under the environmental stress of temperature and humidity and under electrical stress, and test conditions for appropriate quality assessment. Specifically, this document specifies test methods and test conditions for measuring the durability of a DUT under temperature and humidity conditions and applied