M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals Revision:SEMI M14-89 - Inactive This edition was approved for

This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24

NOTICE: This Standard was completely rewritten in 2024

2  Because the fitting locations and procedures differ considerably between the two methods

およびSEMI E142

org in May 2015

M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals Revision:SEMI M14-89 - Inactive This edition was approved forThe purpose of this document is to present a process for ion implantation, activation, and measurement of the resulting layers so that meaningful comparisons can be made between various lots of semi insulating GaAs. This test will be performed by the supplier so that product may be represented in a standard way. Referenced SEMI Standards None.