Plasma-Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare Part No: 2541130-01

Part No: 2541130-01

Part No: CQM1-TC101

May Require Calibration This Tylan FM-3900MEP Mass Flow Controller MFC is used working surplus

Model No: Precision 5000 CVD

Model No: LKx5

Plasma-Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare Part No: 2541130-01Plasma Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare Inventory # 18192 Part No: 81539 Model No: Cassette Module Interlock Removed from a Plasma Therm Clusterlock 7000 PM RIE Reactive Ion Etching System This Plasma Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare is used working surplus. Removed from a Plasma Therm Clusterlock 7000 PM RIE Reactive Ion Etching System. The physical condition is good, but