E12800 - SEMI E128 - Specification for XML Message Structures StdPbc-0417 mass flow controllers (MFCs)
$193.00
Description
mass flow controllers (MFCs)
as specified by SEMI M74
SEMI D5 — Standard Size for Flat Panel Display Substrates
This Standard was technically approved by the Flat Panel Display - Factory Automation Global Technical Committee
SEMI E88-0702 (technical revision)
E12800 - SEMI E128 - Specification for XML Message Structures StdPbc-0417 mass flow controllers (MFCs)This Standard specifies XML structures required to encode message header or envelope information for synchronous and asynchronous messages. XML is used in software applications to encode information with tags that provide structure and data type information specified in XML Schemas. XML is also used to structure information needed to route and deliver messages between applications. A standard for message headers is required to avoid development and
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