G09200 - SEMI G92 - 450 mmウェーハ用テープフレームカセットの仕様 Revision:SEMI G92-0412 - Superseded internal reticle movement

internal reticle movement

1 — Provisional Specification for SECS-II Protocol Substrate Tracking

The document provides a framework for carrying out risk assessments on equipment in the semiconductor and similar industries and is intended for use by supplier and purchaser as a reference for EHS considerations

with or without a sheet metal enclosure

polycrystalline or micromorph Si films

G09200 - SEMI G92 - 450 mmウェーハ用テープフレームカセットの仕様 Revision:SEMI G92-0412 - Superseded internal reticle movementAssembly & Packaging Global Technical Committee2013822global Audits and Reviews Subcommittee201311www. semiviews. org www. semi. org20124 450mm PGVAGVOHT450mm 450mm450mm(TFC) 1325 3 6 Referenced SEMI Standards SEMI G88 Specification for Tape Frame for 450 mm Wafer