M06500 - SEMI M65 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M65-0306E2 - Superseded data item variables

data item variables

SEMI E88-0304 (technical revision)

The edge lengths specified range from 202

1-0918 (technical revision)

• Protection of the recipes in equipment from non-privileged access by defining protected recipe spaces per purposes

M06500 - SEMI M65 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M65-0306E2 - Superseded data item variablesglobal Compound Semiconductor Materials Committee2006116global Audits and Reviews Subcommittee20062www. semi. org20063CD ROM E20068R2 2 Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M3 Specifications for Polished Monocrystalline Sapphire Substrates SEMI MF26 Test Method for Determining the Orientation of a Semi conductive Single Crystal SEMI MF523 Practice for Unaided Visual Inspections of Polished