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E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdPbc-0418 local operation
E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdPbc-0418 local operation
$115.50
Description
local operation
Standardized test methods for measuring them are required to avoid disagreement between business partners regarding wafer quality and specification
This Document is not intended to describe a measurement procedure
SEMI E70-1103 (technical revision)
The approximate range of generation lifetime that can be measured is 1 µs to 10 ms
E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdPbc-0418 local operationSEMI SEMI Physical Interfaces & Carriers Global Technical Committee20131223global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org2011620129 SEMI M74450 mm 450 MACMACFOUPFOUPMAC 450mm 450mm 450 mmKCP 3 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E30. 1 Inspection and Review Specific Equipment Model (ISEM) SEMI E144 Provisional Specification for RF Air
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