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iF1400 Edwards iF 1400 Rapid Loadlock Vacuum Dry Pump 13471 Hrs Tested Working Model No: AIH-64QS-T5

$3252.11

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Model No: AIH-64QS-T5

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UPPER This Mattson Technology 304-06563-00 Quartz Upper Heater Shield is new surplus

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Model No: I/O BOARD ASSY

iF1400 Edwards iF 1400 Rapid Loadlock Vacuum Dry Pump 13471 Hrs Tested Working Model No: AIH-64QS-T5iF1400 Edwards iF 1400 Rapid Loadlock Vacuum Dry Pump 13471 Hrs Tested Working Part No: iF1400 Model No: iF Series Input: 460VAC, 60Hz Run Time: 13471 Hours Installed Components Pump Display Part No: D37282000 Part No: NRA112000, IH100 E BOX + LONGER CABLES Yaskawa Motor Part No: WELK 5iT1 Yaskawa Motor Part No: WELK 5T1 This item is working surplus. It was tested in our facility and is fully functional. The physical condition is good, but there are

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