E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1104 (Reapproved 0816) - Superseded 1-0303 (first published)

1-0303 (first published)

本試験方法は，global Compound Semiconductor Committeeで技術的に承認されている。現版は2005年11月29日，global Audits and Reviews Subcommitteeにて発行が承認された。2006年1月にwww

SEMI E82-1101 (technical revision)

2  A specification of the material quality of SI GaAs substrates includes a number of the parameters described below

as needed to capture the unique data parameters available from each

E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1104 (Reapproved 0816) - Superseded 1-0303 (first published)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical