S02400 - SEMI S24 - Safety Guideline for Multi-Employer Work Areas StdTpc-Fire Safety devices that may classify a

devices that may classify a process endpoint by determining the size and count of particles in the process environment

This Test Method covers four procedures that are widely used for making routine measurements

This Practice is particularly useful for preparing the microscope to measure the width of lines on hard-surface photomasks and processed silicon wafers

This Guide provides a framework for reporting of nanotopography surface features on silicon wafers

such as hazardous energies

S02400 - SEMI S24 - Safety Guideline for Multi-Employer Work Areas StdTpc-Fire Safety devices that may classify aThis Safety Guideline was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1, 2011. Available at www. semiviews. org and www. semi. org in August 2011; originally published 1995; previously published March 2006. NOTICE: This Document was reapproved with minor editorial changes. NOTICE: This Standard or Safety Guideline